Honda Ultrasonic Flowmeter

Principal
Fluid velocity is measured using ultrasound and liquid flow rate is calculated based on the velocity

Advantages

• Unique arithmetic processing by DSP (Digital Signal Processor) makes stable flow measurement
• 2-channel measurement helps cost reduction and space-saving
• Easy installation with detachable cable
• No moving parts inside of the sensor and low-pressure loss
• 5 sizes of sensor for measurement from 0 to 2 l/min up to 0 to 80 l/min
• All the wetted surfaces are made of NEW PFA resisting against DIW and various chemical liquids
• Conformed to EMC standard (EN61326) and complied with RoHS directive
• Selectable from either HLF820 with display or HLF810 without display

Applications

• Flow measurement of the slurry liquids for CMP (Chemical Mechanical Polishing) process.
• Flow measurement of DIW or ultrapure water for Semiconductor manufacturing process
• Flow control of high corrosive chemical liquids to be dispensed for the manufacturing process

Honda Ultrasonic Flowmeter Presentation

Honda Ultrasonic Flowmeter Catalogue